1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Ultrafast thermoreflectance techniques for measuring thermal conductivity and interface thermal conductance of thin films
Rent:
Rent this article for
USD
10.1063/1.3504213
/content/aip/journal/jap/108/9/10.1063/1.3504213
http://aip.metastore.ingenta.com/content/aip/journal/jap/108/9/10.1063/1.3504213

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of the optical paths of our ultrafast pump-and-probe thermoreflectance system.

Image of FIG. 2.
FIG. 2.

Schematic diagram of a trilayer sample that ultrafast thermoreflectance techniques are used to measure the thermal conductivity of the thin film in the middle layer: (a) sectional view; and (b) top view, where the bigger circle is the pump spot with as the radius and the smaller circle is the probe spot with radius .

Image of FIG. 3.
FIG. 3.

TDTR signals of (a) 110 nm and (b) 518 nm thick thin films and the best-fit to the theoretical thermal conduction model with different modulation frequencies. The dashed lines are analytical results using the thermal conductivity of the thin film with −20% and changes to the best-fit value, respectively.

Image of FIG. 4.
FIG. 4.

Sensitivity of TDTR signal to the thermal properties of thin films: (a) sensitivity to of 100 nm on silicon substrate with different modulation frequencies; (b) sensitivity to of different thicknesses of thin films at 4 MHz modulation frequency; and (c) sensitivity to of 100 nm on silicon substrate with different and .

Image of FIG. 5.
FIG. 5.

Sensitivity of FDTR signals to: (a) thermal conductivity of the thin film , and (b) interface thermal conductance with different modulation frequencies for 100, 200, and 500 nm thin films.

Image of FIG. 6.
FIG. 6.

Comparison of FDTR signal sensitivity to thermal conductivity of the thin film and interface thermal conductance between the thin film and the Si substrate.

Image of FIG. 7.
FIG. 7.

FDTR signals of thin films with different thickness at 500 ps delay-time and the best-fit to the theoretical model of thermal transport: (a) 110 nm, (b) 304 nm, and (c) 518 nm.

Tables

Generic image for table
Table I.

Comparisons among , TDTR, and FDTR methods.

Generic image for table
Table II.

Best-fit values obtained from the TDTR experimental data.

Generic image for table
Table III.

Best-fit values obtained from the FDTR experimental data.

Loading

Article metrics loading...

/content/aip/journal/jap/108/9/10.1063/1.3504213
2010-11-04
2014-04-25
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ultrafast thermoreflectance techniques for measuring thermal conductivity and interface thermal conductance of thin films
http://aip.metastore.ingenta.com/content/aip/journal/jap/108/9/10.1063/1.3504213
10.1063/1.3504213
SEARCH_EXPAND_ITEM