1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Numerical simulations of electrical asymmetry effect on electronegative plasmas in capacitively coupled rf discharge
Rent:
Rent this article for
USD
10.1063/1.3530626
/content/aip/journal/jap/109/1/10.1063/1.3530626
http://aip.metastore.ingenta.com/content/aip/journal/jap/109/1/10.1063/1.3530626

Figures

Image of FIG. 1.
FIG. 1.

Self-bias at the driven electrode for different .

Image of FIG. 2.
FIG. 2.

At 30 mTorr, cycle-averaged (a) electron density, (b) ion density, and (c) ion density, vs for oxygen plasmas.

Image of FIG. 3.
FIG. 3.

At 103 mTorr, cycle-averaged (a) electron density, (b) ion density, and (c) ion density, vs for oxygen plasmas.

Image of FIG. 4.
FIG. 4.

Cycle-averaged electric field vs at (a) 30 mTorr and (b) 103 mTorr, for oxygen plasmas.

Image of FIG. 5.
FIG. 5.

Cycle-averaged plasma density at (a) 30 mTorr and (b) 103 mTorr, vs for argon plasmas.

Image of FIG. 6.
FIG. 6.

The electronegativity in plasmas at 30 and 103 mTorr.

Image of FIG. 7.
FIG. 7.

Cycle-averaged electron absorbed power density for plasmas at (a) 30 mTorr and (b) 103 mTorr.

Image of FIG. 8.
FIG. 8.

Cycle-averaged electron absorbed power density for Ar plasmas at (a) 30 mTorr and (b) 103 mTorr.

Image of FIG. 9.
FIG. 9.

Electron energy probability functions vs for (a) oxygen plasmas and (b) argon plasmas, at 103 mTorr.

Image of FIG. 10.
FIG. 10.

Ion flux in one rf period vs .

Image of FIG. 11.
FIG. 11.

IEDs vs for (a) oxygen plasmas and (b) argon plasmas, at 103 mTorr.

Tables

Generic image for table
Table I.

List of the collisions considered in oxygen simulations. The references where the cross sections or rate constants were adopted from are presented in the last column. The rate constants are in and is in eV.

Loading

Article metrics loading...

/content/aip/journal/jap/109/1/10.1063/1.3530626
2011-01-11
2014-04-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Numerical simulations of electrical asymmetry effect on electronegative plasmas in capacitively coupled rf discharge
http://aip.metastore.ingenta.com/content/aip/journal/jap/109/1/10.1063/1.3530626
10.1063/1.3530626
SEARCH_EXPAND_ITEM