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Stress reduction and performance improvement of phase change memory cell by using composite films
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10.1063/1.3544432
/content/aip/journal/jap/109/3/10.1063/1.3544432
http://aip.metastore.ingenta.com/content/aip/journal/jap/109/3/10.1063/1.3544432
/content/aip/journal/jap/109/3/10.1063/1.3544432
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/content/aip/journal/jap/109/3/10.1063/1.3544432
2011-02-03
2014-11-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Stress reduction and performance improvement of phase change memory cell by using Ge2Sb2Te5–TaOx composite films
http://aip.metastore.ingenta.com/content/aip/journal/jap/109/3/10.1063/1.3544432
10.1063/1.3544432
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