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Fabrication of midinfrared quantum cascade laser via oxygen-enhanced nonselective wet thermal oxidation
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10.1063/1.3544489
/content/aip/journal/jap/109/3/10.1063/1.3544489
http://aip.metastore.ingenta.com/content/aip/journal/jap/109/3/10.1063/1.3544489
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

SEM cross section of an InP QCL heterostructure oxidation test sample after nonselective oxidation at for 4 h.

Image of FIG. 2.
FIG. 2.

Thermodynamic favorability, Gibbs free energy , of the wet and dry oxidation reactions for the various alloys in the QCL heterostructure. Solid and dashed lines between the calculated binary end points are representative of ternary alloys and are results of simple linear interpolation.

Image of FIG. 3.
FIG. 3.

SEM cross section of native oxide confined laser ridge before metallization. Inset shows thickness of oxide formed in the field between devices.

Image of FIG. 4.
FIG. 4.

P-I-V characteristics of native oxide confined QCL device. Inset shows a representative linear spectrum.

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/content/aip/journal/jap/109/3/10.1063/1.3544489
2011-02-03
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of midinfrared quantum cascade laser via oxygen-enhanced nonselective wet thermal oxidation
http://aip.metastore.ingenta.com/content/aip/journal/jap/109/3/10.1063/1.3544489
10.1063/1.3544489
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