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The effect of He plasma treatment on properties of organosilicate glass low-k films
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10.1063/1.3549733
/content/aip/journal/jap/109/4/10.1063/1.3549733
http://aip.metastore.ingenta.com/content/aip/journal/jap/109/4/10.1063/1.3549733
/content/aip/journal/jap/109/4/10.1063/1.3549733
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/content/aip/journal/jap/109/4/10.1063/1.3549733
2011-02-23
2014-08-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The effect of He plasma treatment on properties of organosilicate glass low-k films
http://aip.metastore.ingenta.com/content/aip/journal/jap/109/4/10.1063/1.3549733
10.1063/1.3549733
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