1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Tuning the crystallographic and electronic properties of chromium oxynitride films
Rent:
Rent this article for
USD
10.1063/1.3549115
/content/aip/journal/jap/109/5/10.1063/1.3549115
http://aip.metastore.ingenta.com/content/aip/journal/jap/109/5/10.1063/1.3549115

Figures

Image of FIG. 1.
FIG. 1.

Dependence of the oxygen fraction x = O/(N + O) of the CrOxN1−x coatings on the gas flow ratios ΦO2/(ΦN2 + ΦO2).

Image of FIG. 2.
FIG. 2.

X-ray diffractograms of the B1 CrOxN1−x films with different oxygen content x.

Image of FIG. 3.
FIG. 3.

X-ray diffractograms for the corundum-type Cr2(OxN1−x)3 films with different oxygen content x.

Image of FIG. 4.
FIG. 4.

Texture coefficient T hkl vs the oxygen content x of the samples with the B1 structure calculated from the (002) and (111) diffraction peaks.

Image of FIG. 5.
FIG. 5.

Cr 2p, N 1s, and O 1s XPS peaks of the CrOxN1−x films with x = 0.27, 0.70, and 1.00 (samples B, F, and I, respectively).

Image of FIG. 6.
FIG. 6.

Cr 2p3/2, N 1s, and O 1s peak positions (left) and the full width at half maximum (FWHM, right) of the XPS peaks of the films as a function of the oxygen content x.

Image of FIG. 7.
FIG. 7.

XPS valence band spectra for the CrOxN1−x films.

Image of FIG. 8.
FIG. 8.

Valence band edge versus x for the CrOxN1−x films. The line is a guide for the eye only.

Image of FIG. 9.
FIG. 9.

Difference ΔBE of photoelectron binding energies between the Cr 2p3/2 and the Cr 2p1/2, O 1s, and N 1s peaks.

Tables

Generic image for table
Table I.

Sample designation, O2 and N2 gas flow (sccm), relative gas flow ratio ΦO2/(ΦO2 + ΦN2), values of relative oxygen content x = O/ (O + N), composition, and structure of CrOxN1 −x coatings

Loading

Article metrics loading...

/content/aip/journal/jap/109/5/10.1063/1.3549115
2011-03-15
2014-04-19
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Tuning the crystallographic and electronic properties of chromium oxynitride films
http://aip.metastore.ingenta.com/content/aip/journal/jap/109/5/10.1063/1.3549115
10.1063/1.3549115
SEARCH_EXPAND_ITEM