Dependence of the oxygen fraction x = O/(N + O) of the CrOxN1−x coatings on the gas flow ratios ΦO2/(ΦN2 + ΦO2).
X-ray diffractograms of the B1 CrOxN1−x films with different oxygen content x.
X-ray diffractograms for the corundum-type Cr2(OxN1−x)3 films with different oxygen content x.
Texture coefficient T hkl vs the oxygen content x of the samples with the B1 structure calculated from the (002) and (111) diffraction peaks.
Cr 2p, N 1s, and O 1s XPS peaks of the CrOxN1−x films with x = 0.27, 0.70, and 1.00 (samples B, F, and I, respectively).
Cr 2p3/2, N 1s, and O 1s peak positions (left) and the full width at half maximum (FWHM, right) of the XPS peaks of the films as a function of the oxygen content x.
XPS valence band spectra for the CrOxN1−x films.
Valence band edge versus x for the CrOxN1−x films. The line is a guide for the eye only.
Difference ΔBE of photoelectron binding energies between the Cr 2p3/2 and the Cr 2p1/2, O 1s, and N 1s peaks.
Sample designation, O2 and N2 gas flow (sccm), relative gas flow ratio ΦO2/(ΦO2 + ΦN2), values of relative oxygen content x = O/ (O + N), composition, and structure of CrOxN1 −x coatings
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