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Sub-100 μm scale on-chip inductors with CoZrTa for GHz applications
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10.1063/1.3549594
/content/aip/journal/jap/109/7/10.1063/1.3549594
http://aip.metastore.ingenta.com/content/aip/journal/jap/109/7/10.1063/1.3549594
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Cross-sectional SEM images of 2 μm thick copper wires surrounded by CoZrTa magnetic material forming an inductor on a quartz substrate. In this device, the top level of CoZrTa thin film is 0.25 μm thick and the bottom layer is 0.5 μm thick, respectively.

Image of FIG. 2.
FIG. 2.

(Color online) Measured and simulated curves of L and Q vs frequency for rectangular inductors with different magnetic thin film structures. Inset in (b) is an optical image of a two-turn inductor with single-CoZrTa rings wrapped around inductor wires.

Image of FIG. 3.
FIG. 3.

(Color online) Measurements of L and Q vs frequency for strip line inductors with different CoZrTa thin film structures. The inductors can be operated at frequencies up to 5 GHz with peak quality factors as large as 1.5 at 4 GHz. Inset in (b) is an optical image of a strip line inductor with single-CoZrTa rings wrapped around the inductor wires.

Image of FIG. 4.
FIG. 4.

(Color online) Measurements and simulations of inductances for strip line inductors with different thicknesses of CoZrTa layers. Type A inductors have 0.5 μm and 0.25 μm thick CoZrTa thin films at the bottom and top layers, while type B inductors have 0.5 μm thick CoZrTa thin films at both the top and bottom layers.

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/content/aip/journal/jap/109/7/10.1063/1.3549594
2011-03-29
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Sub-100 μm scale on-chip inductors with CoZrTa for GHz applications
http://aip.metastore.ingenta.com/content/aip/journal/jap/109/7/10.1063/1.3549594
10.1063/1.3549594
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