Schematic diagram showing the different configurations for diffused GIXR measurements.
Specular X-ray reflectivity spectra of the multilayer structures.
Specular X-ray reflectivity spectrum with best-fit theoretical curve for the 5-layer multilayer structure.
Diffused X-ray reflectivity spectra of the multilayer structures with best-fit theoretical curves.
Interface diffusivity () values at the different interfaces of the 9-layer and 13-layer W/Si multilayer samples as obtained from fitting of the diffused X-ray reflectivity spectra.
Variation of in-plane correlation lengths () at Si-on-W interfaces across the multilayer structures.
Density, thickness and interface width values of different sub-layers of the W/Si multilayer structures as obtained from the best-fit of the GIXR spectra.
Article metrics loading...
Full text loading...