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Langmuir probe diagnostics of electron energy distributions with optical emission spectroscopy in capacitively coupled rf discharge in nitrogen
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10.1063/1.3664858
/content/aip/journal/jap/110/11/10.1063/1.3664858
http://aip.metastore.ingenta.com/content/aip/journal/jap/110/11/10.1063/1.3664858
/content/aip/journal/jap/110/11/10.1063/1.3664858
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/content/aip/journal/jap/110/11/10.1063/1.3664858
2011-12-05
2014-07-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Langmuir probe diagnostics of electron energy distributions with optical emission spectroscopy in capacitively coupled rf discharge in nitrogen
http://aip.metastore.ingenta.com/content/aip/journal/jap/110/11/10.1063/1.3664858
10.1063/1.3664858
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