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Langmuir probe diagnostics of electron energy distributions with optical emission spectroscopy in capacitively coupled rf discharge in nitrogen
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10.1063/1.3664858
/content/aip/journal/jap/110/11/10.1063/1.3664858
http://aip.metastore.ingenta.com/content/aip/journal/jap/110/11/10.1063/1.3664858
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematics of the experimental setup.

Image of FIG. 2.
FIG. 2.

Measured and simulated optical emission spectra of the second positive system of nitrogen, , for a 30 mTorr discharge and rf voltage .

Image of FIG. 3.
FIG. 3.

(a) EEPF evolution with nitrogen pressure for a fixed voltage and (b) bulk temperature as a function of pressure.

Image of FIG. 4.
FIG. 4.

Electron density and effective electron temperature as a function of the nitrogen pressure at rf voltage .

Image of FIG. 5.
FIG. 5.

(a) Optical emission spectra of nitrogen plasma at pressure of 30 mTorr and rf voltage and (b) dependence of emission intensity of the second positive bandhead ( = 337.1 nm, 0-0) and first negative bandhead ( =391.4 nm, 0-0) of and molecular system on nitrogen pressure at rf voltage .

Image of FIG. 6.
FIG. 6.

Vibrational temperature as a function of nitrogen pressure at rf voltage .

Image of FIG. 7.
FIG. 7.

Rotational temperature as a function of nitrogen pressure at rf voltage .

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/content/aip/journal/jap/110/11/10.1063/1.3664858
2011-12-05
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Langmuir probe diagnostics of electron energy distributions with optical emission spectroscopy in capacitively coupled rf discharge in nitrogen
http://aip.metastore.ingenta.com/content/aip/journal/jap/110/11/10.1063/1.3664858
10.1063/1.3664858
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