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Surface acoustic wave velocity of gold films deposited on silicon substrates at different temperatures
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10.1063/1.3606412
/content/aip/journal/jap/110/2/10.1063/1.3606412
http://aip.metastore.ingenta.com/content/aip/journal/jap/110/2/10.1063/1.3606412

Figures

Image of FIG. 1.
FIG. 1.

(Color online) XRR patterns of Au samples deposited at different substrate temperatures. Interference peaks observed are employed to obtain thickness using Bragg’s Law. Arbitrary units were taken and spectra were vertically shifted for the sake of clarity.

Image of FIG. 2.
FIG. 2.

(Color online) XRD patterns showing the (111) diffraction peak of the Au samples. Inset, rocking curves in the 〈111〉 direction. Arbitrary units were taken and spectra were vertically shifted for the sake of clarity.

Image of FIG. 3.
FIG. 3.

(Color online) 2 × 2 μm AFM contact mode pictures of Au thin films deposited at 200 K (up), 300 K (center), and 450 K (down) are shown in the first column, with their respective self-correlation pictures in the second column. The intensity profiles obtained by means of self-correlation images at horizontal-central line are plotted under the pictures.

Image of FIG. 4.
FIG. 4.

(Color online) 700 × 700 nm SEM pictures of the surface of Au thin films deposited at 200 K (up), 300 K (center), and 450 K (down) are shown in the first column, with their respective self-correlation pictures in the second column. The intensity profiles obtained by means of self-correlation images at horizontal-central line are plotted under the pictures.

Image of FIG. 5.
FIG. 5.

(Color online) (a) Experimental configuration of HRBS on the Au samples deposited on Si (001) substrate. represents the wave vector of the incident laser beam (λ = 514.5 nm), represents the wave vector of the scattered light, φ is the azimuthal angle (defined φ = 0 in direction 〈100〉) and θ is the sagittal angle (defined θ = 0 in direction 〈00-1〉). (b) HBRS spectrum of sample prepared at 400 K and azimuthal angle of 110°. Rayleigh and Sezawa SAW peaks can be observed.

Image of FIG. 6.
FIG. 6.

(Color online) Comparison between SAW velocity (Rayleigh mode) experimental values of samples deposited at different substrate temperatures and numerical simulation of Au polycrystalline isotropic film (see values in Table I). Azimuthal angle 0° matches with direction 〈100〉 and 45° with 〈110〉 of Si (001) substrate.

Image of FIG. 7.
FIG. 7.

(Color online) Comparison between the average SAW velocity (a) and microstructural experimental data as a function of the used substrate temperatures during deposition. FWHM texture (b) and length of coherence (c) values obtained from XRD patterns; surface grain size values from AFM and SEM are also plotted (c).

Image of FIG. 8.
FIG. 8.

(Color online) Variation of the mean value of the Rayleigh vSAW with the increase of Au content in the native SiO2 layer. The value at 100% must not be taken into account.

Tables

Generic image for table
Table I.

Summary of elastic constants for Si and for different Au symmetries and spatial averages taken into account in the numerical simulations. V, R, and H stand for Voigt, Reuss, and Hill averages, respectively.

Generic image for table
Table II.

Evolution of the 5 independent elastic constants of <111> textured gold with the substrate temperature.

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/content/aip/journal/jap/110/2/10.1063/1.3606412
2011-07-19
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Surface acoustic wave velocity of gold films deposited on silicon substrates at different temperatures
http://aip.metastore.ingenta.com/content/aip/journal/jap/110/2/10.1063/1.3606412
10.1063/1.3606412
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