1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Transition from single to multi-walled carbon nanotubes grown by inductively coupled plasma enhanced chemical vapor deposition
Rent:
Rent this article for
USD
10.1063/1.3615945
/content/aip/journal/jap/110/3/10.1063/1.3615945
http://aip.metastore.ingenta.com/content/aip/journal/jap/110/3/10.1063/1.3615945

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Reaction chamber used in this research showing (A) top view and (B) side view. In (B) the antenna is shown rotated 90° for clarity. Distance between antenna and sample is 10 cm.

Image of FIG. 2.
FIG. 2.

SEM image of surface after PECVD showing masked areas where no catalyst is present and unmasked where nanotubes have been produced (A), scale bar is 10 μm. Increased magnification of the PECVD surface showing short SWCNT (B), scale bar is 2 μm.

Image of FIG. 3.
FIG. 3.

(Color online) Raman spectra of the substrate showing boundary between areas with catalyst (SWCNT-solid line) and without catalyst (silicon-dashed line). Inset is a 100 × 100 μm Raman image, plotting the intensity of the G band at 1590 cm−1 showing the boundary between the masked and unmasked areas.

Image of FIG. 4.
FIG. 4.

Enlargement of Raman G band region showing G peak at 1570 cm−1 and G+ peak at 1590 cm−1, characteristic of semiconducting SWCNT.

Image of FIG. 5.
FIG. 5.

(Color online) Raman spectra with changing growth time (A) and growth temperature (B).

Image of FIG. 6.
FIG. 6.

(Color online) XPS survey spectra for bare silicon, silicon after iron deposition and finally after PECVD growth has occurred.

Image of FIG. 7.
FIG. 7.

High resolution XPS spectrum of SWCNT C1s binding region.

Tables

Generic image for table
Table I.

Methane dissociation reactions (Ref. 23).

Loading

Article metrics loading...

/content/aip/journal/jap/110/3/10.1063/1.3615945
2011-08-01
2014-04-16
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Transition from single to multi-walled carbon nanotubes grown by inductively coupled plasma enhanced chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/jap/110/3/10.1063/1.3615945
10.1063/1.3615945
SEARCH_EXPAND_ITEM