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Texture and microstructure evolution in single-phase Ti x Ta1− x N alloys of rocksalt structure
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10.1063/1.3622585
/content/aip/journal/jap/110/4/10.1063/1.3622585
http://aip.metastore.ingenta.com/content/aip/journal/jap/110/4/10.1063/1.3622585

Figures

Image of FIG. 1.
FIG. 1.

(Color online) XRD patterns from Ti x Ta1− x N samples grown by PLD, DIBS, and DCMS for various x.

Image of FIG. 2.
FIG. 2.

(Color online) Evolution of the lattice constant vs x for Ti x Ta1− x N samples grown by PLD, DCMS and DIBS (closed and open symbols stand for as grown and annealed samples, respectively).

Image of FIG. 3.
FIG. 3.

(Color online) (a) The variation of stress-free lattice constant α 0 of Ti x Ta1− x N films and (b) relative expansion of the stress-free lattice constant from Vegard’s rule prediction.

Image of FIG. 4.
FIG. 4.

(Color online) Texture coefficient (TC111) vs the composition for samples grown by PLD, DCMS, and DIBS.

Image of FIG. 5.
FIG. 5.

(Color online) Grain size along the (111) and (200) orientations (closed and open symbols, respectively) vs composition for samples grown by PLD, DCMS, and DIBS. The insets show HR-SEM cross section images of the corresponding DCMS-grown samples.

Tables

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Table I.

Results of the SRIM calculations of the main parameters of sputter growth.

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/content/aip/journal/jap/110/4/10.1063/1.3622585
2011-08-31
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Texture and microstructure evolution in single-phase TixTa1−xN alloys of rocksalt structure
http://aip.metastore.ingenta.com/content/aip/journal/jap/110/4/10.1063/1.3622585
10.1063/1.3622585
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