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Preparation of superior lubricious amorphous carbon films co-doped by silicon and aluminum
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10.1063/1.3626929
/content/aip/journal/jap/110/5/10.1063/1.3626929
http://aip.metastore.ingenta.com/content/aip/journal/jap/110/5/10.1063/1.3626929

Figures

Image of FIG. 1.
FIG. 1.

(Color online) The composition (a) and thickness of the films (b) as functions of the CH4/Ar flow rate ratio.

Image of FIG. 2.
FIG. 2.

(Color online) (a) Raman spectra of the films deposited under different CH4/Ar ratios, (b) G band position and I (D)/I (G) ratio from Raman spectra as a function of the CH4/Ar ratio.

Image of FIG. 3.
FIG. 3.

(Color online) XPS spectra of the films deposited under different CH4/Ar ratios.

Image of FIG. 4.
FIG. 4.

(Color online) (a) H and E as functions of the CH4/Ar ratio, (b) H/E, H3/E2, and We. % as functions of the CH4/Ar ratio.

Image of FIG. 5.
FIG. 5.

(Color online) Typical loading-unloading curves of three samples.

Image of FIG. 6.
FIG. 6.

(Color online) (Left column) AER/friction force-load curves of scratch tests of the films on the stainless steel substrate. (Right column) Optical micrographs at lower critical failure points of samples along a progressive load scratch (scratch direction is from left to right).

Image of FIG. 7.
FIG. 7.

(a) Bright field TEM image of sample 2; (b) high resolution TEM image of sample 2.

Image of FIG. 8.
FIG. 8.

(Color online) (a) Friction curves and (b) wear rate and average friction coefficient of the films deposited in different CH4/Ar ratio atmospheres.

Tables

Generic image for table
Table I.

Two kinds of sp3/sp2 ratios and sp3(C–C) fraction of the samples.

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/content/aip/journal/jap/110/5/10.1063/1.3626929
2011-09-08
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Preparation of superior lubricious amorphous carbon films co-doped by silicon and aluminum
http://aip.metastore.ingenta.com/content/aip/journal/jap/110/5/10.1063/1.3626929
10.1063/1.3626929
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