(Color online) The composition (a) and thickness of the films (b) as functions of the CH4/Ar flow rate ratio.
(Color online) (a) Raman spectra of the films deposited under different CH4/Ar ratios, (b) G band position and I (D)/I (G) ratio from Raman spectra as a function of the CH4/Ar ratio.
(Color online) XPS spectra of the films deposited under different CH4/Ar ratios.
(Color online) (a) H and E as functions of the CH4/Ar ratio, (b) H/E, H3/E2, and We. % as functions of the CH4/Ar ratio.
(Color online) Typical loading-unloading curves of three samples.
(Color online) (Left column) AER/friction force-load curves of scratch tests of the films on the stainless steel substrate. (Right column) Optical micrographs at lower critical failure points of samples along a progressive load scratch (scratch direction is from left to right).
(a) Bright field TEM image of sample 2; (b) high resolution TEM image of sample 2.
(Color online) (a) Friction curves and (b) wear rate and average friction coefficient of the films deposited in different CH4/Ar ratio atmospheres.
Two kinds of sp3/sp2 ratios and sp3(C–C) fraction of the samples.
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