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Nitrogen [N]-incorporated ZnO piezoelectric thin films and their application for ultra-small film bulk acoustic wave resonator device fabrication
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10.1063/1.3641638
/content/aip/journal/jap/110/7/10.1063/1.3641638
http://aip.metastore.ingenta.com/content/aip/journal/jap/110/7/10.1063/1.3641638
/content/aip/journal/jap/110/7/10.1063/1.3641638
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/content/aip/journal/jap/110/7/10.1063/1.3641638
2011-10-03
2014-09-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nitrogen [N]-incorporated ZnO piezoelectric thin films and their application for ultra-small film bulk acoustic wave resonator device fabrication
http://aip.metastore.ingenta.com/content/aip/journal/jap/110/7/10.1063/1.3641638
10.1063/1.3641638
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