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Viscosity sensor using ZnO and AlN thin film bulk acoustic resonators with tilted polar c-axis orientations
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10.1063/1.3657781
/content/aip/journal/jap/110/9/10.1063/1.3657781
http://aip.metastore.ingenta.com/content/aip/journal/jap/110/9/10.1063/1.3657781
/content/aip/journal/jap/110/9/10.1063/1.3657781
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/content/aip/journal/jap/110/9/10.1063/1.3657781
2011-11-09
2014-07-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Viscosity sensor using ZnO and AlN thin film bulk acoustic resonators with tilted polar c-axis orientations
http://aip.metastore.ingenta.com/content/aip/journal/jap/110/9/10.1063/1.3657781
10.1063/1.3657781
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