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Erratum: “Stress determination in nickel monosilicide films using x-ray diffraction” [J. Appl. Phys.106, 073521 (2009)]
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1.
1. D. Connetable and O. Thomas, Phys. Rev. B 79, 094101 (2009).
http://dx.doi.org/10.1103/PhysRevB.79.094101
2.
2. D. F. Wilson and O. B. Cavin, Scr. Metall. Mater. 26, 85 (1992).
http://dx.doi.org/10.1016/0956-716X(92)90374-N
3.
3. C. E. Murray, Z. Zhang, and C. Lavoie, J. Appl. Phys. 106, 073521 (2009).
http://dx.doi.org/10.1063/1.3236626
4.
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Figures

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FIG. 1.

(Color online) Comparison of in-plane stress measurements of a NiSi film using Neerfeld-Hill averaged x-ray elastic constants for single crystal stiffness components calculated using different first-principles methods. The average of all three x-ray stress values is included along with the calculated stress due to thermal mismatch between NiSi and the Si substrate.

Tables

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Table I.

Calculated x-ray elastic constants for several reflections of NiSi under the Voigt, Reuss, and Neerfeld-Hill limit using the projected augmented wave (PAW) pseudopotential single crystal stiffness tensor components.

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Table II.

Calculated x-ray elastic constants for several reflections of NiSi under the Voigt, Reuss, and Neerfeld-Hill limit using the ultrasoft (US) pseudopotential single crystal stiffness tensor components.

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Table III.

Calculated x-ray elastic constants for several reflections of NiSi under the Voigt, Reuss, and Neerfeld-Hill limit using the relaxed projected augmented wave (RPAW) pseudopotential single crystal stiffness tensor components.

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Table IV.

Calculated values for the thermal stress parameter Δσ, the change of in-plane film stress due to temperature, the corresponding in-plane NiSi film stress for a temperature difference of −320 °C and the mean stress averaged over the three sets of diffraction measurements.

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2011-11-08
2014-04-17

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Scitation: Erratum: “Stress determination in nickel monosilicide films using x-ray diffraction” [J. Appl. Phys.106, 073521 (2009)]
http://aip.metastore.ingenta.com/content/aip/journal/jap/110/9/10.1063/1.3660347
10.1063/1.3660347
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