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The influence of the substrate thermal conductivity on scanning thermochemical lithography
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10.1063/1.4729809
/content/aip/journal/jap/111/12/10.1063/1.4729809
http://aip.metastore.ingenta.com/content/aip/journal/jap/111/12/10.1063/1.4729809
/content/aip/journal/jap/111/12/10.1063/1.4729809
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/content/aip/journal/jap/111/12/10.1063/1.4729809
2012-06-22
2014-11-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The influence of the substrate thermal conductivity on scanning thermochemical lithography
http://aip.metastore.ingenta.com/content/aip/journal/jap/111/12/10.1063/1.4729809
10.1063/1.4729809
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