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Thermoplastic deformation of silicon surfaces induced by ultrashort pulsed lasers in submelting conditions
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10.1063/1.3688020
/content/aip/journal/jap/111/5/10.1063/1.3688020
http://aip.metastore.ingenta.com/content/aip/journal/jap/111/5/10.1063/1.3688020
/content/aip/journal/jap/111/5/10.1063/1.3688020
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/content/aip/journal/jap/111/5/10.1063/1.3688020
2012-03-01
2014-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Thermoplastic deformation of silicon surfaces induced by ultrashort pulsed lasers in submelting conditions
http://aip.metastore.ingenta.com/content/aip/journal/jap/111/5/10.1063/1.3688020
10.1063/1.3688020
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