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A method to extract absorption coefficient of thin films from transmission spectra of the films on thick substrates
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10.1063/1.3700178
/content/aip/journal/jap/111/7/10.1063/1.3700178
http://aip.metastore.ingenta.com/content/aip/journal/jap/111/7/10.1063/1.3700178
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Reflection and transmission for a free standing film.

Image of FIG. 2.
FIG. 2.

Reflection and transmission for a thin film on a Si wafer.

Image of FIG. 3.
FIG. 3.

High resolution transmission spectrum of a Si wafer.

Image of FIG. 4.
FIG. 4.

Zoom in on interference fringes from Figure 3.

Image of FIG. 5.
FIG. 5.

Spectrum of the uncoated silicon wafer.

Image of FIG. 6.
FIG. 6.

Schematic representation of energy flows at two wafer interfaces.

Image of FIG. 7.
FIG. 7.

Measured spectrum (a), correction (b), and corrected spectrum (c).

Image of FIG. 8.
FIG. 8.

Correction procedure results with the film thickness and refractive index as provided by ellipsometry. The letters identifying the spectra are the same as in Fig. 7.

Image of FIG. 9.
FIG. 9.

Refractive index (a) and absorption index (b) of the thin film.

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/content/aip/journal/jap/111/7/10.1063/1.3700178
2012-04-11
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A method to extract absorption coefficient of thin films from transmission spectra of the films on thick substrates
http://aip.metastore.ingenta.com/content/aip/journal/jap/111/7/10.1063/1.3700178
10.1063/1.3700178
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