Reflection and transmission for a free standing film.
Reflection and transmission for a thin film on a Si wafer.
High resolution transmission spectrum of a Si wafer.
Zoom in on interference fringes from Figure 3.
Spectrum of the uncoated silicon wafer.
Schematic representation of energy flows at two wafer interfaces.
Measured spectrum (a), correction (b), and corrected spectrum (c).
Correction procedure results with the film thickness and refractive index as provided by ellipsometry. The letters identifying the spectra are the same as in Fig. 7.
Refractive index (a) and absorption index (b) of the thin film.
Article metrics loading...
Full text loading...