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Plasma potential mapping of high power impulse magnetron sputtering discharges
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10.1063/1.3700242
/content/aip/journal/jap/111/8/10.1063/1.3700242
http://aip.metastore.ingenta.com/content/aip/journal/jap/111/8/10.1063/1.3700242
/content/aip/journal/jap/111/8/10.1063/1.3700242
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/content/aip/journal/jap/111/8/10.1063/1.3700242
2012-04-23
2014-10-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Plasma potential mapping of high power impulse magnetron sputtering discharges
http://aip.metastore.ingenta.com/content/aip/journal/jap/111/8/10.1063/1.3700242
10.1063/1.3700242
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