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Homogeneous and elongation-free 3D microfabrication by a femtosecond laser pulse and hologram
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View: Figures


Image of FIG. 1.
FIG. 1.

A schematic diagram of the holographic 3D microfabrication system: a pulse emitted from the femtosecond pulse laser penetrates through a hologram and an objective lens and fabricates a 3D microstructure inside a sample material. The hologram pattern shown here is used for fabricating the spiral dot array in Fig. 5.

Image of FIG. 2.
FIG. 2.

(a) The design of the intensity variation hologram. The percentage indicates the maximum intensity of each dot. (b) The intensity distribution as a function of the distance from the center of the dot. (c) An SEM image of the fabricated structure using this intensity variation hologram. (d) The relationship between the average diameters of each dot and the intensity peak width. The dashed line indicates the condition in which the measured diameter and the calculated peak width are equal.

Image of FIG. 3.
FIG. 3.

(a) The regenerated light intensity distributions of two different holograms are shown as a 3D surface map. (b) The cross sectional view of Fig. 3(a) along the optical axis. (c) The measured elongation length as a function of the pulse fluence.

Image of FIG. 4.
FIG. 4.

The behavior of the virtual and real images is shown. The focal length of the objective lens f L is located at the center of the vertical axis. In the case of f H  ≪ d (green series), the virtual and real images are located at the same side of the f L , whereas they are located opposite side in the case of f H  ≪ d (blue series). If f H is comparable to d (red series), the real image moves toward infinite, and only the virtual image contributes to the fabrication.

Image of FIG. 5.
FIG. 5.

The model image (left) and optical micrograph (right) of an elongation-free spiral dot array fabricated inside the silica glass is shown and compared with our previous work; (upper images) top view; (lower images) side view.

Image of FIG. 6.
FIG. 6.

The model 3D image (left) and optical micrograph (right) of an elongation-free V-shaped line microstructure fabricated inside silica glass.


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Scitation: Homogeneous and elongation-free 3D microfabrication by a femtosecond laser pulse and hologram