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Resonant planar antenna as an inductive plasma source
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10.1063/1.4705978
/content/aip/journal/jap/111/8/10.1063/1.4705978
http://aip.metastore.ingenta.com/content/aip/journal/jap/111/8/10.1063/1.4705978
/content/aip/journal/jap/111/8/10.1063/1.4705978
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/content/aip/journal/jap/111/8/10.1063/1.4705978
2012-04-27
2014-09-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Resonant planar antenna as an inductive plasma source
http://aip.metastore.ingenta.com/content/aip/journal/jap/111/8/10.1063/1.4705978
10.1063/1.4705978
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