SEM images of the nanostructures produced by 800 nm fs-laser irradiation with the scan speed of 40 μm/s and the exposure of 15.4 J/cm2. The laser polarization is oriented at 0° (a) and 90° (b) to the scan direction.
(a) AFM line profiles along the central region of the scanned line, (b) line profile along the nanograting valley crossing the scan line, and (c)AFM image of the scanned line. A and B are the top and the valley of a grating. C is the same as B, and D is the un-irradiated surface.
SEM images of several nanostructures [(a), (c), and (e)] and their diffraction patterns [(b), (d), and (f)] with a 633 nm laser. The fs-laser polarization was oriented at 0° [(a) and (c)] and 90° (e) to the scan direction.
Auger signals corresponding the line scan of oxygen and aluminum in the nanograting. (a) and (b) are before fabrication and (c) and (d) are after fabrication. Two dot lines indicate the valley of nanogratings.
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