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High-aspect-ratio grooves fabricated in silicon by a single pass of femtosecond laser pulses
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10.1063/1.4709726
/content/aip/journal/jap/111/9/10.1063/1.4709726
http://aip.metastore.ingenta.com/content/aip/journal/jap/111/9/10.1063/1.4709726
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic illustration for the fabrication of the grooves in de-ionized water.

Image of FIG. 2.
FIG. 2.

SEM images of grooves fabricated in de-ionized water under different scanning speeds: (a) 5 μm/s; (b) 10 μm/s; (c) 15 μm/s. The laser power was set at 5.0 mW. The magnified morphology of the area marked out in (c) was illustrated in (d), (e), and (f).

Image of FIG. 3.
FIG. 3.

SEM images of the grooves fabricated in ambient air. The laser average power was 5.0 mW, and the scanning speed was 5 μm/s. The magnified morphology of the area marked out in (a) was illustrated in (b), (c), and(d).

Image of FIG. 4.
FIG. 4.

Atomic percentage of oxygen species in the surrounding of the grooves fabricated in water: the measured points are marked out in (a), the atomic percentage of oxygen along the transverse and longitudinal directions are illustrated in (b) and (c), respectively.

Image of FIG. 5.
FIG. 5.

Atomic percentage of oxygen species in the surrounding of the grooves fabricated in ambient air: the measured points are marked out in (a), the atomic percentage of oxygen along the transverse and longitudinal directions are illustrated in (b) and (c), respectively.

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/content/aip/journal/jap/111/9/10.1063/1.4709726
2012-05-02
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High-aspect-ratio grooves fabricated in silicon by a single pass of femtosecond laser pulses
http://aip.metastore.ingenta.com/content/aip/journal/jap/111/9/10.1063/1.4709726
10.1063/1.4709726
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