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Electromigration in Cu(Al) and Cu(Mn) damascene lines
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10.1063/1.4711070
/content/aip/journal/jap/111/9/10.1063/1.4711070
http://aip.metastore.ingenta.com/content/aip/journal/jap/111/9/10.1063/1.4711070
/content/aip/journal/jap/111/9/10.1063/1.4711070
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/content/aip/journal/jap/111/9/10.1063/1.4711070
2012-05-10
2014-08-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electromigration in Cu(Al) and Cu(Mn) damascene lines
http://aip.metastore.ingenta.com/content/aip/journal/jap/111/9/10.1063/1.4711070
10.1063/1.4711070
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