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Low threshold field emission from high-quality cubic boron nitride films
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10.1063/1.4711093
/content/aip/journal/jap/111/9/10.1063/1.4711093
http://aip.metastore.ingenta.com/content/aip/journal/jap/111/9/10.1063/1.4711093

Figures

Image of FIG. 1.
FIG. 1.

Top-view SEM images of (a) Jet-dc, (b) Jet-rf, (c) ICP-dc, and (d) Jet-sp2.

Image of FIG. 2.
FIG. 2.

(a) Visible and (b) UV Raman spectra of Jet-dc, Jet-rf, ICP-dc, and Jet-sp2.

Image of FIG. 3.
FIG. 3.

GXRD patterns of Jet-dc, Jet-rf, ICP-dc, and Jet-sp2.

Image of FIG. 4.
FIG. 4.

(a) XPS core level B 1 s and (b) valence band N 1 s spectra of Jet-dc, Jet-rf, ICP-dc, and Jet-sp2.

Image of FIG. 5.
FIG. 5.

(a) Field emission characteristics of Jet-dc, Jet-rf, ICP-dc, and Jet-sp2 and (b) the FN plots corresponding to (a). I and E are the emission current and the applied field, respectively.

Image of FIG. 6.
FIG. 6.

(a) UPS spectrum for Jet-dc and (b) predicted energy-band diagram for a BN film surface under an applied field. CBM, conduction band minimum and VBM, valence band maximum.

Tables

Generic image for table
Table I.

Deposition conditions of four film samples in a plasma jet and an ICP.

Generic image for table
Table II.

Turn-on field, Δ and in the low field region, and surface rms roughness. was calculated from Eq. (1) by assuming 3.5 eV.

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/content/aip/journal/jap/111/9/10.1063/1.4711093
2012-05-14
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low threshold field emission from high-quality cubic boron nitride films
http://aip.metastore.ingenta.com/content/aip/journal/jap/111/9/10.1063/1.4711093
10.1063/1.4711093
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