Top-view SEM images of (a) Jet-dc, (b) Jet-rf, (c) ICP-dc, and (d) Jet-sp2.
(a) Visible and (b) UV Raman spectra of Jet-dc, Jet-rf, ICP-dc, and Jet-sp2.
GXRD patterns of Jet-dc, Jet-rf, ICP-dc, and Jet-sp2.
(a) XPS core level B 1 s and (b) valence band N 1 s spectra of Jet-dc, Jet-rf, ICP-dc, and Jet-sp2.
(a) Field emission characteristics of Jet-dc, Jet-rf, ICP-dc, and Jet-sp2 and (b) the FN plots corresponding to (a). I and E are the emission current and the applied field, respectively.
(a) UPS spectrum for Jet-dc and (b) predicted energy-band diagram for a BN film surface under an applied field. CBM, conduction band minimum and VBM, valence band maximum.
Deposition conditions of four film samples in a plasma jet and an ICP.
Turn-on field, Δ and in the low field region, and surface rms roughness. was calculated from Eq. (1) by assuming 3.5 eV.
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