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Ion mass spectrometry investigations of the discharge during reactive high power pulsed and direct current magnetron sputtering of carbon in Ar and Ar/N2
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10.1063/1.4733692
/content/aip/journal/jap/112/1/10.1063/1.4733692
http://aip.metastore.ingenta.com/content/aip/journal/jap/112/1/10.1063/1.4733692
/content/aip/journal/jap/112/1/10.1063/1.4733692
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/content/aip/journal/jap/112/1/10.1063/1.4733692
2012-07-09
2015-03-01
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Scitation: Ion mass spectrometry investigations of the discharge during reactive high power pulsed and direct current magnetron sputtering of carbon in Ar and Ar/N2
http://aip.metastore.ingenta.com/content/aip/journal/jap/112/1/10.1063/1.4733692
10.1063/1.4733692
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