The schematic structure of those samples with different templates: (a) GaN, (b) Al0.1Ga0.9 N, (c) Al0.2Ga0.8 N, and (d) Al0.3Ga0.7 N.
AFM images of samples A, B, C, and D (2.5 μm × 2.5 μm scan area).
The experimental curves of HR-XRD (002) ω-2θ scan of samples A, B, C, and D.
FTIR absorption spectra of samples A, B, C, and D. The insetted figure shows that the ISBT wavelength is blue moved with the increase of the Al mole composition in the AlGaN template.
Raman spectra of samples A, B, C, and D. The insetted figure shows the Raman shift of GaN-E2 high mode as a function of the Al mole composition of AlGaN template.
Reciprocal space mappings of (105) diffraction of samples A, B, C, and D.
The FWHM of (002) XRC of AlGaN templates.
Lattice constants of SL0 and AlGaN templates, and basal strain of those four samples.
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