A schematic of the experimental setup.
Schematic representation of the tip-charged sample system configuration.
as a function of z for different values, for (a) and (b). at z = 100 nm as a function of for (c) and for (d). Error bars are smaller than the markers.
at z = 100 nm as a function of ( –3, –2, –1, 0, 1, 2, 3, 4 V), for a wafer which has undergone 10 min of ozone treatment. Error bars are smaller than the markers.
at z = 100 nm as a function of for (red squares), 0 V (green circles), and −2 V (blue triangles). –2, –1, 0, 1, 2, 3 V. Error bars are smaller than the markers.
calculated in 3 different ways: (1) extracted from the parabolas obtained for each using the force curve-based method (red triangles), (2) calculated from Eq. (6) after measuring the phases using a standard EFM measurement for each (green squares), (3) same as 2, but this time omitting term from Eq. (6) (black circles).
(a) Measured between the two electrodes as a function of time upon applying (at t = 0 s) for different humidity conditions. . Continuous lines are best fits to exponential time dependence, (b) as a function of time upon applying (at t = 0 s) at different distances from grounded electrode, as labeled in the plot. and are the initial and final measured . Continuous lines are best fit to exponential time dependence.
Schematic presentation of the suggested model. (a) Upon applying to the gate, electric field lines are created in the system due to the charged electrodes. Under the influence of their lateral components, surface charges start drifting and redistributing across the . This movement is assisted by water layers on the surface. (b) Final surface charge distribution.
Simulation results. (a) A snapshot of the electrical potential (color plot) and electrical field lines (white lines) in the vicinity of one of the electrodes half way through the charge accumulation process while applying to the gate electrode. (b) Experimental charge accumulation vs time (red) and simulation results (blue).
Article metrics loading...
Full text loading...