1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Water assisted gate induced temporal surface charge distribution probed by electrostatic force microscopy
Rent:
Rent this article for
USD
10.1063/1.4761981
/content/aip/journal/jap/112/8/10.1063/1.4761981
http://aip.metastore.ingenta.com/content/aip/journal/jap/112/8/10.1063/1.4761981
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

A schematic of the experimental setup.

Image of FIG. 2.
FIG. 2.

Schematic representation of the tip-charged sample system configuration.

Image of FIG. 3.
FIG. 3.

as a function of z for different values, for (a) and (b). at z = 100 nm as a function of for (c) and for (d). Error bars are smaller than the markers.

Image of FIG. 4.
FIG. 4.

at z = 100 nm as a function of ( –3, –2, –1, 0, 1, 2, 3, 4 V), for a wafer which has undergone 10 min of ozone treatment. Error bars are smaller than the markers.

Image of FIG. 5.
FIG. 5.

at z = 100 nm as a function of for (red squares), 0 V (green circles), and −2 V (blue triangles). –2, –1, 0, 1, 2, 3 V. Error bars are smaller than the markers.

Image of FIG. 6.
FIG. 6.

calculated in 3 different ways: (1) extracted from the parabolas obtained for each using the force curve-based method (red triangles), (2) calculated from Eq. (6) after measuring the phases using a standard EFM measurement for each (green squares), (3) same as 2, but this time omitting term from Eq. (6) (black circles).

Image of FIG. 7.
FIG. 7.

(a) Measured between the two electrodes as a function of time upon applying (at t = 0 s) for different humidity conditions. . Continuous lines are best fits to exponential time dependence, (b) as a function of time upon applying (at t = 0 s) at different distances from grounded electrode, as labeled in the plot. and are the initial and final measured . Continuous lines are best fit to exponential time dependence.

Image of FIG. 8.
FIG. 8.

Schematic presentation of the suggested model. (a) Upon applying to the gate, electric field lines are created in the system due to the charged electrodes. Under the influence of their lateral components, surface charges start drifting and redistributing across the . This movement is assisted by water layers on the surface. (b) Final surface charge distribution.

Image of FIG. 9.
FIG. 9.

Simulation results. (a) A snapshot of the electrical potential (color plot) and electrical field lines (white lines) in the vicinity of one of the electrodes half way through the charge accumulation process while applying to the gate electrode. (b) Experimental charge accumulation vs time (red) and simulation results (blue).

Loading

Article metrics loading...

/content/aip/journal/jap/112/8/10.1063/1.4761981
2012-10-25
2014-04-18
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Water assisted gate induced temporal surface charge distribution probed by electrostatic force microscopy
http://aip.metastore.ingenta.com/content/aip/journal/jap/112/8/10.1063/1.4761981
10.1063/1.4761981
SEARCH_EXPAND_ITEM