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Validation of a correction procedure for removing the optical effects from transmission spectra of thin films on substrates
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10.1063/1.4764346
/content/aip/journal/jap/112/9/10.1063/1.4764346
http://aip.metastore.ingenta.com/content/aip/journal/jap/112/9/10.1063/1.4764346
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Optical constants for the model material used in the subsequently to be described simulations. The upper trace is the refractive index and the lower trace is the absorption index. The dotted line shows absorption index multiplied by six to emphasize the weaker features at higher frequencies.

Image of FIG. 2.
FIG. 2.

Integral peak absorbance divided by film thickness vs. film thickness for material with optical constants shown in Figure 1. The integration was performed between 2082 cm−1 and 2102 cm−1 for the weak and narrow peak positioned at 2093 cm−1.

Image of FIG. 3.
FIG. 3.

“Measured” (solid line), correction (dotted line) and corrected (dashed line) transmission spectrum for a 1000 nm thick film. The zero absorbance line (solid) is also drawn to help guide the eye.

Image of FIG. 4.
FIG. 4.

Fringe amplitude (in absorbance) vs. refractive index of the film. The amplitude is calculated as a (positive) depth from the zero absorbance line.

Image of FIG. 5.
FIG. 5.

The correction spectrum for an absorbing film (solid line) and the spectrum of a nonabsorbing film with the same refractive index.

Image of FIG. 6.
FIG. 6.

Transmission spectra for 1640 nm (solid line), 500 nm (dashed line), and 50 nm (dotted line) thick films. The zero absorbance line is not drawn to avoid interference with the spectrum of the 50 nm thick film.

Image of FIG. 7.
FIG. 7.

The absorption indices (three overlapping lines) extracted from the spectra from Fig. 5 using the correction method described in Ref. 1. The extracted absorption indices closely match (within 0.2%) the input absorption index from Fig. 1 except in the narrow region near 400 cm−1

Image of FIG. 8.
FIG. 8.

Refractive index of the model material extracted by the correction procedure compared to the true refractive index. The two curves are indistinguishable except near 400 cm−1.

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/content/aip/journal/jap/112/9/10.1063/1.4764346
2012-11-07
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Validation of a correction procedure for removing the optical effects from transmission spectra of thin films on substrates
http://aip.metastore.ingenta.com/content/aip/journal/jap/112/9/10.1063/1.4764346
10.1063/1.4764346
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