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Development of the sputtering yields of ArF photoresist after the onset of argon ion bombardment
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10.1063/1.4772996
/content/aip/journal/jap/113/1/10.1063/1.4772996
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/1/10.1063/1.4772996
/content/aip/journal/jap/113/1/10.1063/1.4772996
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/content/aip/journal/jap/113/1/10.1063/1.4772996
2013-01-04
2014-07-26
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Scitation: Development of the sputtering yields of ArF photoresist after the onset of argon ion bombardment
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/1/10.1063/1.4772996
10.1063/1.4772996
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