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Mechanical properties of polymer/carbon nanotube composite micro-electromechanical systems bridges
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View: Figures


Image of FIG. 1.
FIG. 1.

Scheme of the three polymer MEMS bridge configurations types (a) PEDOT:PSS/PMMA (≡ PEDOT); (b) PEDOT:PSS/CNT/PMMA (≡ CNT1); and (c) (PEDOT:PSS/CNT)×2/PMMA (≡ CNT2).

Image of FIG. 2.
FIG. 2.

Schematic diagram of main steps of the micro-fabrication process of PEDOT:PSS/CNT/PMMA (CNT1) bridges (longitudinal cross section and top view). The optical micrographs on the right were taken on the correspondingly labeled steps.

Image of FIG. 3.
FIG. 3.

SEM micrograph of a CNT1 bridge with an air gap of 1.3 μm, (d), a length of 47 μm (L), a width of 10 μm (w), and a thickness of 520 nm (h).

Image of FIG. 4.
FIG. 4.

Characteristic resonance peaks of the fundamental flexural mode of electrostatically actuated and optically detected of PEDOT:PSS/PMMA (PEDOT), PEDOT:PSS/CNT/PMMA (CNT1), and (PEDOT:PSS/CNT)×2/PMMA (CNT2) bridges with L = 47 μm, w = 10 μm, and h = 500 nm. The right panel shows the resonant peak of a n+-a-Si:H bridge (L = 30 μm, w = 10 μm, and h = 300 nm) for comparison. A table with the calculated (EI)eff values for each polymer bridge type is shown as an inset. The marker indicates the calculated f res according to Eq. (1) (see text for details).

Image of FIG. 5.
FIG. 5.

Bubble graph of the resonance frequency squared (f res)2 hysteresis as a function of applied DC voltage squared (V DC)2 for: (a) a n+-a-Si:H bridge (L = 30 μm, w = 8 μm, and h = 300 nm); (b) a PEDOT (L = 32 μm); (c) a CNT1 bridge (L = 37 μm,); and (d) a CNT2 bridge (L = 47 μm). In each plot, the diameter of the bubbles is proportional to the respective Q value (the value is not normalized between plots). Lines are linear fits for each cycle. The AC voltage was kept at 1.26 V.

Image of FIG. 6.
FIG. 6.

Resonance frequency shift (%) hysteresis curve as a function of the measurement temperature T for a n+-a-Si:H bridge (L = 30 μm and w = 8 μm), a PEDOT bridge (L = 67 μm), and a CNT2 bridge (L = 47 μm).

Image of FIG. 7.
FIG. 7.

Resonance frequency shift (%) (left column) and quality factor (right column) as a function of ambient pressure during measurement for different L values: ((a) and (b)) PEDOT; ((c) and (d)) CNT1; and ((e)-(f)) CNT2 resonators (V DC = 10 V and V AC = 1.26 V). Lines correspond to a free molecular flow regime model.

Image of FIG. 8.
FIG. 8.

(a) Resonance frequency shift and (b) quality factor as a function of the number of resonant cycles for PEDOT, n+-a-Si:H, CNT1, and CNT2 bridges.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Mechanical properties of polymer/carbon nanotube composite micro-electromechanical systems bridges