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Interlayer growth in Mo/B4C multilayered structures upon thermal annealing
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10.1063/1.4800910
/content/aip/journal/jap/113/14/10.1063/1.4800910
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/14/10.1063/1.4800910

Figures

Image of FIG. 1.
FIG. 1.

Period change as a function of annealing time at 300 °C in various Mo/B4C multilayers. The as-deposited thickness of Mo layers in all multilayers is 3 nm. The as-deposited B4C thicknesses in corresponding multilayers are indicated on the plot.

Image of FIG. 2.
FIG. 2.

(a) Mo/B4C multilayer stress as a function of B4C thickness for as-deposited state and various stages after annealing at 300 °C. (b) Mo/B4C multilayer stress as a function of annealing time at 300 °C. As-deposited Mo thickness in all multilayers is 3 nm. The B4C thicknesses are indicated on the graph.

Image of FIG. 3.
FIG. 3.

(a) AES depth profiles before (dotted lines) and after annealing (solid lines) for Mo/B4C multilayer with B4C thickness of 3 nm. (b) Compound interlayer thickness in Mo/B4C multilayers as a function of B4C thickness.

Image of FIG. 4.
FIG. 4.

Change in Mo crystallite size as a function of annealing time at 300 °C in various Mo/B4C multilayers. The as-deposited Mo crystallites size in all multilayers is (2.0 ± 0.1) nm.

Image of FIG. 5.
FIG. 5.

Stress relaxation versus period change in Mo/B4C multilayers after the following annealing stages: (a) 5 min, (b) 4 h, and (c) 48 h. For each data point, the corresponding as-deposited B4C thickness (in nanometers) is indicated on the plot. The dotted lines are a guide to the eye.

Image of FIG. 6.
FIG. 6.

Model depicting structural differences in as-deposited Mo/B4C multilayers with different as-deposited B4C thicknesses.

Image of FIG. 7.
FIG. 7.

Period change as a function of annealing time at 350 °C in Mo/B4C multilayers. The thickness of Mo layers in all multilayers is 3 nm, while the as-deposited B4C thicknesses in corresponding multilayers are indicated on the plot.

Tables

Generic image for table
Table I.

Molecular volumes of Mo, B, and C consumed in chemical reactions to form various binary compounds. VI and VII are molecular volumes of the first element and second element, respectively, and Vcompound is the molecular volume of the corresponding formed compound. Calculations are based on bulk density values. Densification is expected for all reactions.

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/content/aip/journal/jap/113/14/10.1063/1.4800910
2013-04-11
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Interlayer growth in Mo/B4C multilayered structures upon thermal annealing
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/14/10.1063/1.4800910
10.1063/1.4800910
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