High resolution X-ray scattering intensity around 004 Bragg peak. The interference structure on the left-hand side of the peak allows the determination of the strain profile (H+ implant dose 3 × 1016 cm−2).
Variation of the maximum strain as a function of the implanted doseshowing the three different regimes. Solid line: low dose regime, slope = 2.6 × 10−19 cm2/H+. Dotted line: medium dose regime, slope = 6× 10−19 cm2/H+.
Calculated expansion volumes (per specie) for different low-energy species including one or two hydrogen atoms. Calculations are performed on a 216-atom box (V = 4410 Å3) assuming constant pressure boundary conditions. BC = bond center, AB = anti-bonding, T = tetrahedral, and Hex = hexagonal refer to different sites for atom or molecule locations in the Si structure. The species in bold are those consistent with the low-dose slope, in italic those consistent with the medium dose slope.
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