Schematic representation of the shape of the vibrational modes of a plate. The dashed lines represent the nodal diametral and radial lines.
(a) Resonance frequency as a function of disk radius of an a-Si:H disk in the cases of a plate (ω 1 mn a = 3.196) and membrane (ω 1 mn a = 2.405), according to Eq. (2) (h = 3 μm) (b).
(a) Schematic of cross section of disk resonator. (b) SEM micrograph of a thin-film silicon microresonator fabricated on a glass substrate with one pair of actuation electrodes.
Resonance peaks of a 200 μm diameter disk resonator measured in vacuum with in-phase actuation (top) and anti-phase actuation (bottom).
Tension parameter as a function of the disk radius for the first vibrational mode (0,1) in the plate-like (k < 2) and membrane-like (k > 20) limits. 33
Resonance frequency as a function of the inverse disk radius for a-Si:H resonator modes (0,1) and (0,2) measured in vacuum (10−3 Pa).
Nonlinear vibrations effect due to large deformation at high bias voltage for a 100-μm radius disk.
Quality factor measured in vacuum as a function of the resonance frequency for a-Si:H disk resonators with radius that ranges from 50 μm to 113 μm.
Quality factor as a function of resonance frequency for the families of modes with multiple number of radial nodes (100 μm radius disk resonator).
Resonance frequency variation relative to unannealed state (top) and quality factor (bottom) for a series of 6 successive 1 h annealing steps at 250 °C.
Quality factor variation as a function of time for modes (0,1), (1,1)a, (1,1)b, and (0,2) of a 100 μm radius disk resonator.
Values of (α1 mna) for a disk clamped along the edges in the limit of negligible tension .
Values of (α1 mna) for a disk clamped along the edges in the limit of high tension .
Non-degenerated frequencies of modes (1,1) and (2,1) of a 125 μm radius disk.
Article metrics loading...
Full text loading...