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Study of nanospheres lithography technology with super-lens for fabricating nano holes
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10.1063/1.4803845
/content/aip/journal/jap/113/18/10.1063/1.4803845
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/18/10.1063/1.4803845
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Scheme configuration of NSSL.

Image of FIG. 2.
FIG. 2.

The scheme configuration being simulated: (a) The silver slab is in contact with the PSs. (b) The silver slab is not in contact with the PSs and placed on the focal plane.

Image of FIG. 3.
FIG. 3.

Simulation results: (a) The energy field on the PR surface and (b) energy distribution of the spot.

Image of FIG. 4.
FIG. 4.

Frequency spectra on the two surfaces of the silver slab: (a) the frequency spectra in the case of silver being in contact with the PSs and (b) the frequency spectra in the case of silver not being in contact with the PSs.

Image of FIG. 5.
FIG. 5.

The optimisation parameters. The solid line shows the relation between the diameter of the PS and the highest resolution. The dashed line shows the resolution for different PSs with the optimal Ag film thickness.

Image of FIG. 6.
FIG. 6.

Nano holes with feature size of 75 nm.

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/content/aip/journal/jap/113/18/10.1063/1.4803845
2013-05-09
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Study of nanospheres lithography technology with super-lens for fabricating nano holes
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/18/10.1063/1.4803845
10.1063/1.4803845
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