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Effect of silane/hydrogen ratio on microcrystalline silicon thin films by remote inductively coupled plasma
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10.1063/1.4807404
/content/aip/journal/jap/113/20/10.1063/1.4807404
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/20/10.1063/1.4807404

Figures

Image of FIG. 1.
FIG. 1.

(a) Raman spectra of μc-Si:H films fabricated with different SR. Insert shows as a function of SR and the corresponding result using typical ICP for comparison. (b) A schematic decomposition of the Raman spectrum of the sample deposited at SR of 5.

Image of FIG. 2.
FIG. 2.

X-ray diffraction spectra of μc-Si:H films deposited on quartz substrates with different SR.

Image of FIG. 3.
FIG. 3.

FTIR spectra of μc-Si:H films deposited on double polished Si substrates with different SR. Inset shows the calculated hydrogen concentration vs. SR.

Image of FIG. 4.
FIG. 4.

(a) The relation of Photo-, dark-conductivity, and photosensitivity of μc-Si:H films with SR. (b) Photo-, dark-conductivity, and photosensitivity of μc-Si:H films as a function of .

Image of FIG. 5.
FIG. 5.

The relation of open circuit voltage of the glass/ZnO:Al/p-i-n/ZnO:Al solar cells with the of the intrinsic layer.

Tables

Generic image for table
Table I.

Calculated value of , , and crystalline peak position of μc-Si:H thin films deposited with various SR.

Generic image for table
Table II.

FWHM of (220) and (111) diffraction peaks, and the ratio of intensity of (220) to (111) peaks of μc-Si:H thin films deposited with various SR.

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/content/aip/journal/jap/113/20/10.1063/1.4807404
2013-05-23
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of silane/hydrogen ratio on microcrystalline silicon thin films by remote inductively coupled plasma
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/20/10.1063/1.4807404
10.1063/1.4807404
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