Extreme ultraviolet Mo/Si multilayers protected by capping layers of different materials were exposed to 13.5 nm plasma sourceradiation generated with a table-top laser to study the irradiation damage mechanism. Morphology of single-shot damaged areas has been analyzed by means of atomic force microscopy. Threshold fluences were evaluated for each type of sample in order to determine the capability of the capping layer to protect the structure underneath.
Received 11 March 2013Accepted 09 May 2013Published online 28 May 2013
This research was performed in a collaboration framework between FERMI@ELETTRA and CNR-IFN U.O.S. Padova, Italy; the authors thank Dr. Daniele Cocco, SLAC National Accelerator Laboratory at Stanford, for the helpful discussion. This work was performed with the financial support of CAssa di RIsparmio di PAdova e Rovigo (CARIPARO) Foundation in the framework of Bandi di Eccellenza 2009/2010, project ADORA. The authors also wish to thank Dr. A. Giglia and Professor S. Nannarone for the support in the measurements at ELETTRA-BEAR beamline.
Article outline: I. INTRODUCTION II. SAMPLES AND DAMAGE TESTING PROCEDURE III. RESULTS AND DISCUSSION A. Damage morphology B. Quantitative analysis of damaging IV. CONCLUSIONS
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