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Laser ablation of ceramic Al2O3 at 193 nm and 248 nm: The importance of single-photon ionization processes
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10.1063/1.4809639
/content/aip/journal/jap/113/22/10.1063/1.4809639
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/22/10.1063/1.4809639
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

KE distributions at  = 4 cm obtained by mass spectrometry of (a) Al, (b) O, and (c) Al upon ablation at 193 nm (full line) at 0.4 J/cm ((a) and (b)) and 2 J/cm (c), and 248 nm (dashed line) at 1.6 J/cm ((a) and (b)) and 4 J/cm (c).

Image of FIG. 2.
FIG. 2.

Relative amount of (a) Al, (b) Al, and (c) O species at  = 4 cm as a function of fluence upon ablation at (▪) 193 nm and (◻) 248 nm. The normalization factor is the value at the highest fluence studied in each case. The inset in (b) shows the absolute amount of Al species having (○) KE < 70 eV and (●) KE > 70 eV as a function of fluence. Lines are guidelines.

Image of FIG. 3.
FIG. 3.

Spectral (vertical)–spatial (horizontal) images acquired at 173 ns ((a)and (b)) and 453.5 ns ((c) and (d)) after the laser pulse and produced upon ablation at ((a) and (c)) 193 nm at 2 J/cm and ((b) and (d)) 248 nm at 2.8 J/cm. The spectral range from top to bottom is 267-263 nm and the spatial interval is 1.15 mm. The neutral Al I lines are (1) 266.03 nm and (2) 265.24 nm and the ion Al II lines are (1) 263.50 nm and (2) 263.15 nm.

Image of FIG. 4.
FIG. 4.

KE distributions obtained from the spectral-spatial images acquired at 173 ns for (a) Al (▽, 263.15 nm line) and Al (◻, 569.6 nm line), (b) O (388.21 nm line), and (c) Al (266.03 nm line) upon ablation at 193 nm at 2 J/cm ((a) and (b)), (◻) in (c) and 248 nm at 2.8 J/cm ((○) in (c)). Full lines correspond to the best fit to the experimental data using a flux weighted shifted Maxwell-Boltzmann distribution.

Image of FIG. 5.
FIG. 5.

Evolution of the Maxwell-Boltzmann temperature with time of (a) Al (▪), Al (◻), and O (○) upon ablation at 193 nm and (b) Al upon ablation at 193 nm (○) and 248 nm (◇). The fluences used are 2 J/cm and 2.8 J/cm for ablation at 193 nm and 248 nm, respectively, and we used the same spectral lines than those used for Fig. 4 . Lines are guidelines.

Image of FIG. 6.
FIG. 6.

Space-time plot of obtained using the Stark width method and the Al lines upon ablation at (a) 193 nm at 2 J/cm and (b) 248 nm at 2.8 J/cm. Lines of constant have been plotted as guidelines and values are in 10 cm units.

Image of FIG. 7.
FIG. 7.

Space-time plot of obtained using the Boltzmann plot method and Al lines upon ablation at (a) 193 nm at 2 J/cm and (b) 248 nm at 2.8 J/cm. Lines of constant have been plotted as guidelines and values are in eV.

Image of FIG. 8.
FIG. 8.

Space-time plot of (a) obtained using the Stark width method and the Al lines and (b) obtained using the Boltzmann plot method and O lines, both upon ablation at 193 nm at 2 J/cm. Lines of constant and have been plotted as guidelines and values are, respectively, in 10 cm and eV units.

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/content/aip/journal/jap/113/22/10.1063/1.4809639
2013-06-10
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Laser ablation of ceramic Al2O3 at 193 nm and 248 nm: The importance of single-photon ionization processes
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/22/10.1063/1.4809639
10.1063/1.4809639
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