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X-ray spectroscopic study of SrTiOx films with different interlayers
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10.1063/1.4809978
/content/aip/journal/jap/113/22/10.1063/1.4809978
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/22/10.1063/1.4809978
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Ti L absorption spectra of the systems SrTiO/B/Si with different ILs (B: SiO, SiN, and HfO). (a) For different film thickness: dark lines correspond to thick films and light lines correspond to thin films; (b) for thick films: The left hand insets are zooms of the b and b′ features.

Image of FIG. 2.
FIG. 2.

(a) O K-absorption spectra of the SrTiO(15 nm)/B/Si samples with different ILs (B), (B: SiO, SiN, and HfO), (b) Fragment of the O K-absorption spectra feature . The decomposition of the feature is shown in the O K-absorption spectrum of the SrTiO/SiO/Si sample.

Image of FIG. 3.
FIG. 3.

O K-absorption spectra of the SrTiO(7 nm)/B/Si samples with different ILs (B), where B is SiN–1; HfO–2 and SiO–3. The reference spectra are also shown: SiO (Ref. ) and HfO (Ref. ).

Image of FIG. 4.
FIG. 4.

Experimental Sr 3p and C 1s photoelectron spectra from SrTiO(15 nm)/HfO/Si sample measured at an excitation energy of 700 eV and normal emission angle before and after cleaning the surface.

Image of FIG. 5.
FIG. 5.

Experimental and fitted photoelectron spectra from SrTiO(15 nm)/HfO/Si sample measured at an excitation energy of 700 eV and normal emission angle after cleaning of the surface. (a) O 1s spectra; (b) Sr 3d spectra.

Image of FIG. 6.
FIG. 6.

Experimental and fitted Sr 3d photoelectron spectra from SrTiO(15 nm)/B/Si samples measured: (a) at an excitation energy of 700 eV and normal emission angle after cleaning and (b) at an excitation energy of 4100 eV and 10° emission angle.

Image of FIG. 7.
FIG. 7.

Experimental and fitted Si 2p photoelectron spectra from SrTiO(15 nm)/B/Si samples measured at an excitation energy of 4100 eV and 10° emission angle.

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/content/aip/journal/jap/113/22/10.1063/1.4809978
2013-06-11
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: X-ray spectroscopic study of SrTiOx films with different interlayers
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/22/10.1063/1.4809978
10.1063/1.4809978
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