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Lateral heat diffusion investigation of a layered structure: Application to the complete thermal characterization of a lithium phosphorous oxynitride film
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10.1063/1.4811520
/content/aip/journal/jap/113/24/10.1063/1.4811520
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/24/10.1063/1.4811520
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Insulating layer on a known substrate or a stack of known layers, covered with a conducting layer.

Image of FIG. 2.
FIG. 2.

Configuration under study. Left: real configuration (not to scale). Right: Equivalent configuration at high frequencies ( 100 kHz).

Image of FIG. 3.
FIG. 3.

Shifted amplitude and phase of the thermoreflectance signal versus radial coordinate , at different modulation frequencies. For clarity, the curves have been shifted along the ordinate axis (upper panel: 2 muliplier factor between successive curves. Lower panel: 5° shift between adjacent curves). From upper curve to lower curve: 1, 10, 50, 100, 200, 400, 1000 kHz. Full circles are for experimental points. Full lines are fits.

Image of FIG. 4.
FIG. 4.

Determination of the slopes absolute values and , at different frequencies. Upper panel: versus where is the magnitude of the thermoreflectance signal. Lower panel: phase of the thermoreflectance signal versus . Full circles stand for experimental points. Full lines are fits. From upper curve to lower curve: 100, 200, 400, 1000 kHz.

Image of FIG. 5.
FIG. 5.

Upper panel: fit of versus . Lower panel: fit of versus ω. and are the slope of the fitting line. See Eqs. (7) and (8) .

Image of FIG. 6.
FIG. 6.

Calculated temperature (amplitude and phase) at different modulation frequencies. Full lines stand for the simplified configuration (Fig. 2 /right panel). Dashed lines stand for the true configuration (Fig. 2 /left panel).

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/content/aip/journal/jap/113/24/10.1063/1.4811520
2013-06-25
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Lateral heat diffusion investigation of a layered structure: Application to the complete thermal characterization of a lithium phosphorous oxynitride film
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/24/10.1063/1.4811520
10.1063/1.4811520
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