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Detection of defect states in low-k dielectrics using reflection electron energy loss spectroscopy
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10.1063/1.4788980
/content/aip/journal/jap/113/4/10.1063/1.4788980
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/4/10.1063/1.4788980
/content/aip/journal/jap/113/4/10.1063/1.4788980
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/content/aip/journal/jap/113/4/10.1063/1.4788980
2013-01-25
2014-08-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Detection of defect states in low-k dielectrics using reflection electron energy loss spectroscopy
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/4/10.1063/1.4788980
10.1063/1.4788980
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