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Co-doping with antimony to control phosphorous diffusion in germanium
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10.1063/1.4792480
/content/aip/journal/jap/113/7/10.1063/1.4792480
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/7/10.1063/1.4792480
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

A schematic representation of (a)the diffusion of P via the ring-mechanism of diffusion of a P in the Ge lattice. In this mechanism the V exchanges position with the P atom and then it progresses through the ring approaching the P atom through another direction. (b) Represents the proposed ring mechanism of diffusion where the PV pair encounters a Sb atom.

Image of FIG. 2.
FIG. 2.

Diffusion path of (a) the PV pairs (mechanism of Fig. 1(a) ) and the PV pairs in the presence of (b) a second P atom and (c) an Sb atom (both mechanism of Fig. 1(b) ). On the top of the figures is the ring mechanism of diffusion projected onto the (111) surface of Ge. The squares represent the V, smaller circles the P atom, and larger circles the Sb.

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/content/aip/journal/jap/113/7/10.1063/1.4792480
2013-02-15
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Co-doping with antimony to control phosphorous diffusion in germanium
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/7/10.1063/1.4792480
10.1063/1.4792480
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