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A simple-versatile approach to achieve all-Si-based optical micro-cavities
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10.1063/1.4793592
/content/aip/journal/jap/113/8/10.1063/1.4793592
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/8/10.1063/1.4793592

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram illustrating the physical structure of the OMCs prepared by sputtering. The index of refraction and typical thickness of each individual layer are presented in Table I . For clarity reasons, the diagram is not in scale and the top and bottom mirrors (Bragg reflectors) were represented with only one period (single bilayer).

Image of FIG. 2.
FIG. 2.

Optical transmission spectra of VIS-OMC (a) and NIR-OMC (b) structures in the 300–1700 nm wavelength range. The spectra were obtained at room-temperature and under normal light incidence. The theoretical spectra, as provided by the COMSOL platform and the data of Table I , are also shown for comparison.

Image of FIG. 3.
FIG. 3.

Optical transmission spectra of the VIS (a) and NIR (b) optical micro-cavities prepared by sputtering. The spectra correspond to OMCs AD and after thermal annealing at the temperatures indicated in the figure. The spectra were obtained at room-temperature and under normal light incidence.

Image of FIG. 4.
FIG. 4.

Bragg wavelength λ0 and corresponding maximum optical transmission (T0) observed in the VIS-OMC (a) and NIR-OMC (b) structures: AD and after annealing at 250, 500, 750, and 1000 °C. Due to some non-homogeneities, the NIR-OMC was not annealed at 1000 °C. The error bars take into consideration the resolution of the experimental setup and the result of various measurements. The lines joining the data points are just guides to the eye.

Image of FIG. 5.
FIG. 5.

Angle-dependent optical transmission measurements of VIS-OMC (a) and NIR-OMC (b) structures. The data correspond to the Bragg wavelength and its respective optical transmission (insets) as obtained from OMCs after annealing at 1000 °C (a) and 750 °C (b). The solid red lines show the values expected for the Bragg wavelengths λtilt according to the effective index of refraction (neff) of the OMCs. The error bars take into account the resolution of the experimental setup and the result of various measurements.

Tables

Generic image for table
Table I.

Details concerning the construction of the visible and near-infrared OMCs prepared by sputtering. Considering that the top and bottom mirrors are identical and consist of a-Si (high index of refraction) and a-SiN (low index of refraction) intercalated films, the data refer to: their index of refraction at λ0 (nH or nL), their thickness (tH or tL), and number of HL (or LH) bilayers or periods (m). The index of refraction and thickness of the spacer (a-SiN film) is also indicated for each OMC.

Generic image for table
Table II.

Transmission data related to the VIS-OMC and NIR-OMC structures prepared by sputtering: Bragg wavelength (λ0), full width at half maximum (FWHM) height at the Bragg wavelength (Δλ0), stopband width (λSB), and maximum optical transmission at λ0 (T0) and within the stopband region (TSB). The data correspond to as-deposited OMCs and the values in parentheses were provided by the COMSOL platform.

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/content/aip/journal/jap/113/8/10.1063/1.4793592
2013-02-27
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A simple-versatile approach to achieve all-Si-based optical micro-cavities
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/8/10.1063/1.4793592
10.1063/1.4793592
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