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Electron and laser beam-induced current measurements of diamond-like carbon films modified by scanning probe method
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10.1063/1.4794021
/content/aip/journal/jap/113/9/10.1063/1.4794021
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/9/10.1063/1.4794021
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of experimental setup to apply an electric field to DLC on silicon.

Image of FIG. 2.
FIG. 2.

I-V characteristics of as-grown and modified DLC on n-Si. The inset shows the micro-Raman spectra for as-grown and modified DLC films.

Image of FIG. 3.
FIG. 3.

(a) SEM, (b) EBIC, and (c) LBIC images for modified and as-grown DLC on n-Si.

Image of FIG. 4.
FIG. 4.

EBIC and SELBIC vs. accelerating voltage. The inset shows a schematic diagram of the measurement setup.

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/content/aip/journal/jap/113/9/10.1063/1.4794021
2013-03-07
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electron and laser beam-induced current measurements of diamond-like carbon films modified by scanning probe method
http://aip.metastore.ingenta.com/content/aip/journal/jap/113/9/10.1063/1.4794021
10.1063/1.4794021
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