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High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers
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10.1063/1.4812731
/content/aip/journal/jap/114/1/10.1063/1.4812731
http://aip.metastore.ingenta.com/content/aip/journal/jap/114/1/10.1063/1.4812731
/content/aip/journal/jap/114/1/10.1063/1.4812731
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/content/aip/journal/jap/114/1/10.1063/1.4812731
2013-07-03
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers
http://aip.metastore.ingenta.com/content/aip/journal/jap/114/1/10.1063/1.4812731
10.1063/1.4812731
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