X-ray diffraction setup for 3D topography measurements.
Two types of Bragg-case asymmetric-reflection geometries, HA and LA incidence types.
Line sense vector of a dislocation ξ and the Burgers vector b in the DC and CC.
Simulation flow through four coordinate systems. A position vector r s is defined in SC and transferred into DC via CC. D(r) is given in DC, transferred to CC, and then to RC, where Δω th is calculated.
Δω map measurement and simulation for a TED. HA-incidence geometry was used. A 2DMS measurement provides a series of 2D reflection intensity images at step-scanned ω (a), the images of which were reconstructed to the Δω map (b). Simulation provides the Δω sim map shown in (c).
Strain-field analyses of TEDs with six b vectors. HA-incidence geometry was used. The directions of b were estimated using the BB method. The Δω and Δω sim maps correlate effectively, and the “T” marks are related to their compressive (positive) sides.
Strain-field analyses of a TED and BPD near a BPD-TED conversion point by the HA-incidence geometry. The 3D topograph (a) shows that BPD1sub converts TED1epi near the E/S interface. BPD1sub narrows just before the BPD-TED conversion (block arrow). Strain analyses were conducted for the cross-sections C1 (TED1epi) and C2 (BPD1sub). The Δω and Δω sim maps of TED1epi [(b) and (c), respectively] are the same as those in Fig. 7(d) . For BPD1sub, no reasonable Δω image is visible (d). The Δω sim map also indicates very small image intensity (e).
Strain-field analyses of a TED and BPD near a BPD-TED conversion point by the LA-incidence geometry. The 3D view of BPD1sub to TED1epi conversion (a) is provided from almost the same camera angle as that in Fig. 8(a) . BPD1sub similarly narrows just before the BPD-TED conversion (block arrow). Comparing the C1 (Fig. 8 ) and C3 cases shows that the Δω and Δω sim images are inverted, and their intensities decrease from the HA to LA incidences. For the Δω and Δω sim maps of BPD1sub [(d) and (e), respectively], the LA incidence reveals far greater image intensities than the HA incidence in Figs. 8(d) and 8(e) .
Strain-field analyses of a BPD propagating into the epilayer without conversion by the LA-incidence geometry. The 3D topograph (a) shows that BPD2sub propagates into the epilayer as BPD2epi. Δω analyses were conducted for the cross-sections C5 and C6. Unlike Figs. 8(a) and 9(a) , BPD2 does not narrow near the E/S interface (block arrow), and the width of BPD2 image increases as the BPD2 propagates into the epilayer.
Parameters for the simulations.
Evaluation data of the strain analyses of the TEDs in Fig. 6 . Vector notations of b, their angles from the [1 1 −2 0] direction (κ b), and image intensity parameters (Ω and Ωsim) are indicated.
Parameters for quantitative evaluation of strain analyses in Figs. 8–10 and 8–10 .
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