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X-ray microbeam three-dimensional topography for dislocation strain-field analysis of 4H-SiC
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10.1063/1.4812496
/content/aip/journal/jap/114/2/10.1063/1.4812496
http://aip.metastore.ingenta.com/content/aip/journal/jap/114/2/10.1063/1.4812496

Figures

Image of FIG. 1.
FIG. 1.

X-ray diffraction setup for 3D topography measurements.

Image of FIG. 2.
FIG. 2.

Two types of Bragg-case asymmetric-reflection geometries, HA and LA incidence types.

Image of FIG. 3.
FIG. 3.

Line sense vector of a dislocation and the Burgers vector in the DC and CC.

Image of FIG. 4.
FIG. 4.

Simulation flow through four coordinate systems. A position vector is defined in SC and transferred into DC via CC. () is given in DC, transferred to CC, and then to RC, where Δ is calculated.

Image of FIG. 5.
FIG. 5.

Δ map measurement and simulation for a TED. HA-incidence geometry was used. A 2DMS measurement provides a series of 2D reflection intensity images at step-scanned (a), the images of which were reconstructed to the Δ map (b). Simulation provides the Δ map shown in (c).

Image of FIG. 6.
FIG. 6.

Plots of Δ , Δ , and Δ vs. . Δ is expressed by Eq. (10) . The plots of Δ and Δ are the profiles along the dotted lines in Figs. 5(b) and 5(c) , respectively.

Image of FIG. 7.
FIG. 7.

Strain-field analyses of TEDs with six vectors. HA-incidence geometry was used. The directions of were estimated using the BB method. The Δ and Δ maps correlate effectively, and the “T” marks are related to their compressive (positive) sides.

Image of FIG. 8.
FIG. 8.

Strain-field analyses of a TED and BPD near a BPD-TED conversion point by the HA-incidence geometry. The 3D topograph (a) shows that BPD1 converts TED1 near the E/S interface. BPD1 narrows just before the BPD-TED conversion (block arrow). Strain analyses were conducted for the cross-sections C1 (TED1) and C2 (BPD1). The Δ and Δ maps of TED1 [(b) and (c), respectively] are the same as those in Fig. 7(d) . For BPD1, no reasonable Δ image is visible (d). The Δ map also indicates very small image intensity (e).

Image of FIG. 9.
FIG. 9.

Strain-field analyses of a TED and BPD near a BPD-TED conversion point by the LA-incidence geometry. The 3D view of BPD1 to TED1 conversion (a) is provided from almost the same camera angle as that in Fig. 8(a) . BPD1 similarly narrows just before the BPD-TED conversion (block arrow). Comparing the C1 (Fig. 8 ) and C3 cases shows that the Δ and Δ images are inverted, and their intensities decrease from the HA to LA incidences. For the Δ and Δ maps of BPD1 [(d) and (e), respectively], the LA incidence reveals far greater image intensities than the HA incidence in Figs. 8(d) and 8(e) .

Image of FIG. 10.
FIG. 10.

Strain-field analyses of a BPD propagating into the epilayer without conversion by the LA-incidence geometry. The 3D topograph (a) shows that BPD2 propagates into the epilayer as BPD2. Δ analyses were conducted for the cross-sections C5 and C6. Unlike Figs. 8(a) and 9(a) , BPD2 does not narrow near the E/S interface (block arrow), and the width of BPD2 image increases as the BPD2 propagates into the epilayer.

Tables

Generic image for table
Table I.

Parameters for the simulations.

Generic image for table
Table II.

Evaluation data of the strain analyses of the TEDs in Fig. 6 . Vector notations of , their angles from the [1 1 −2 0] direction ( ), and image intensity parameters (Ω and Ω) are indicated.

Generic image for table
Table III.

Parameters for quantitative evaluation of strain analyses in Figs. 8–10 and 8–10 .

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/content/aip/journal/jap/114/2/10.1063/1.4812496
2013-07-11
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: X-ray microbeam three-dimensional topography for dislocation strain-field analysis of 4H-SiC
http://aip.metastore.ingenta.com/content/aip/journal/jap/114/2/10.1063/1.4812496
10.1063/1.4812496
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