EDS spectra of KTaO3−δ thin films deposited at 0.5 Pa and 50 W.
Plan-view SEM image of KTaO3−δ thin film deposited at 0.5 Pa and 50 W. Inset shows the Pt and KTO layers in cross-section SEM image.
Room temperature X-ray diffraction patterns of as-prepared (a) and annealed in oxygen at 400 °C (b) KTaO3−δ thin film deposited at 0.5 Pa and 50 W.
Leakage current density versus applied electric field for the KTaO3−δ thin film.
The Schottky emission plot of ln(J/T2) versus E1/2 for the KTaO3−δ thin film.
The Simmons and Poole-Frenkel plot of ln(J/E) versus E1/2 for the KTaO3-δ thin film.
Complex dielectric constant of the KTaO3−δ film in the plane at temperatures of 115, 255, and 335 °C.
Temperature dependence of and fitting parameters for the KTaO3−δ film.
Room-temperature P(E) curves of KTaO3−δ thin films under maximum applied voltage of 3, 4, 5, and 10 V. The arrows show the direction in which the P = P(E) curve is being drawn.
P(E) curves of KTaO3−δ thin films at temperatures of 28, 290, 330, and 367 °C.
Electric polarization as a function of the temperature for the KTaO3−δ thin film. Inset shows temperature dependence of thermally stimulated depolarization current.
Resistivity and λ for three different fixed temperatures.
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