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Cold atomic beam ion source for focused ion beam applications
1. L. A. Giannuzzi and F. A. Stevie, Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques, and Practice (Springer, 2005).
3. L. Scipioni, L. A. Stern, J. Notte, S. Sijbrandij, and B. Griffin, Adv. Mater. Process. 166, 27 (2008).
14. S. B. van der Geer, M. P. Reijnders, M. J. de Loos, E. J. D. Vredenbregt, P. H. A. Mutsaers, and O. J. Luiten, J. Appl. Phys. 102, 094312 (2007).
21. H. J. Metcalf and P. van der Straten, Laser Cooling and Trapping (Springer, New York, 1999).
22.All uncertainties in this paper are intended to be interpreted as one-standard-deviation, combined standard uncertainty (n.d.).
23. Springer Handbook of Atomic, Molecular, and Optical Physics, 2nd ed., edited by G. W. F. Drake (Springer, 2005).
24. P. W. Hawkes and E. Kasper, Principles of Electron Optics (Academic Press, 1996), Vol. 2.
28. J. E. Barth and P. Kruit, Optik 101, 101 (1996).
29. M. Drewsen, P. Laurent, A. Nadir, G. Santarelli, A. Clairon, Y. Castin, D. Grison, and C. Salomon, Appl. Phys. B: Lasers Opt. 59, 283 (1994).
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We report measurements and modeling of an ion source that is based on ionization of a laser-cooled atomic beam. We show a high brightness and a low energy spread, suitable for use in next-generation, high-resolution focused ion beam systems. Our measurements of total ion current as a function of ionization conditions support an analytical model that also predicts the cross-sectional current density and spatial distribution of ions created in the source. The model predicts a peak brightness of 2 × 107 A m−2 sr−1 eV−1 and an energy spread less than 0.34 eV. The model is also combined with Monte-Carlo simulations of the inter-ion Coulomb forces to show that the source can be operated at several picoamperes with a brightness above 1 × 107 A m−2 sr−1 eV−1. We estimate that when combined with a conventional ion focusing column, an ion source with these properties could focus a 1 pA beam into a spot smaller than 1 nm. A total current greater than 5 nA was measured in a lower-brightness configuration of the ion source, demonstrating the possibility of a high current mode of operation.
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