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/content/aip/journal/jap/114/4/10.1063/1.4816248
1.
1. L. A. Giannuzzi and F. A. Stevie, Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques, and Practice (Springer, 2005).
2.
2. J. M. Chabala, K. K. Soni, J. Li, K. L. Gavrilov, and R. Levi-Setti, Int. J. Mass Spectrom. Ion Process. 143, 191 (1995).
http://dx.doi.org/10.1016/0168-1176(94)04119-R
3.
3. L. Scipioni, L. A. Stern, J. Notte, S. Sijbrandij, and B. Griffin, Adv. Mater. Process. 166, 27 (2008).
4.
4. C. W. Hagen, E. Fokkema, and P. Kruit, J. Vac. Sci. Technol. B 26, 2091 (2008).
http://dx.doi.org/10.1116/1.2987958
5.
5. L. W. Swanson, G. A. Schwind, and A. E. Bell, J. Appl. Phys. 51, 3453 (1980).
http://dx.doi.org/10.1063/1.328197
6.
6. B. W. Ward, J. A. Notte, and N. P. Economou, J. Vac. Sci. Technol. B 24, 2871 (2006).
http://dx.doi.org/10.1116/1.2357967
7.
7. B. G. Freinkman, A. V. Eletskii, and S. I. Zaitsev, Microelectron. Eng. 73–74, 139 (2004).
http://dx.doi.org/10.1016/S0167-9317(04)00087-5
8.
8. B. J. Claessens, S. B. van der Geer, G. Taban, E. J. D. Vredenbregt, and O. J. Luiten, Phys. Rev. Lett. 95, 164801 (2005).
http://dx.doi.org/10.1103/PhysRevLett.95.164801
9.
9. J. L. Hanssen, J. J. McClelland, E. A. Dakin, and M. Jacka, Phys. Rev. 74, 063416 (2006).
http://dx.doi.org/10.1103/PhysRevA.74.063416
10.
10. B. J. Claessens, M. P. Reijnders, G. Taban, O. J. Luiten, and E. J. D. Vredenbregt, Phys. Plasmas 14, 093101 (2007).
http://dx.doi.org/10.1063/1.2771518
11.
11. J. L. Hanssen, S. B. Hill, J. Orloff, and J. J. McClelland, Nano Lett. 8, 2844 (2008).
http://dx.doi.org/10.1021/nl801472n
12.
12. A. V. Steele, B. Knuffman, J. J. McClelland, and J. Orloff, J. Vac. Sci. Technol. B 28, C6F1 (2010).
http://dx.doi.org/10.1116/1.3502668
13.
13. B. Knuffman, A. V. Steele, J. Orloff, and J. J. McClelland, New J. Phys. 13, 103035 (2011).
http://dx.doi.org/10.1088/1367-2630/13/10/103035
14.
14. S. B. van der Geer, M. P. Reijnders, M. J. de Loos, E. J. D. Vredenbregt, P. H. A. Mutsaers, and O. J. Luiten, J. Appl. Phys. 102, 094312 (2007).
http://dx.doi.org/10.1063/1.2804287
15.
15. M. Senoner and W. E. S. Unger, J. Anal. At. Spectrom. 27, 1050 (2012).
http://dx.doi.org/10.1039/c2ja30015j
16.
16. J. Nellessen, J. Werner, and W. Ertmer, Opt. Commun. 78, 300 (1990).
http://dx.doi.org/10.1016/0030-4018(90)90365-Z
17.
17. C. C. Tsao, Y. Wang, J. Weiner, and V. S. Bagnato, J. Appl. Phys. 80, 8 (1996).
http://dx.doi.org/10.1063/1.362774
18.
18. J. G. C. Tempelaars, R. J. W. Stas, P. G. M. Sebel, H. C. W. Beijerinck, and E. J. D. Vredenbregt, Eur. Phys. J. D 18, 113 (2002).
http://dx.doi.org/10.1140/e10053-002-0013-8
19.
19. K. Dieckmann, R. J. C. Spreeuw, M. Weidemüller, and J. T. M. Walraven, Phys. Rev. 58, 3891 (1998).
http://dx.doi.org/10.1103/PhysRevA.58.3891
20.
20. Z. T. Lu, K. L. Corwin, M. J. Renn, M. H. Anderson, E. A. Cornell, and C. E. Wieman, Phys. Rev. Lett. 77, 3331 (1996).
http://dx.doi.org/10.1103/PhysRevLett.77.3331
21.
21. H. J. Metcalf and P. van der Straten, Laser Cooling and Trapping (Springer, New York, 1999).
22.
22.All uncertainties in this paper are intended to be interpreted as one-standard-deviation, combined standard uncertainty (n.d.).
23.
23. Springer Handbook of Atomic, Molecular, and Optical Physics, 2nd ed., edited by G. W. F. Drake (Springer, 2005).
24.
24. P. W. Hawkes and E. Kasper, Principles of Electron Optics (Academic Press, 1996), Vol. 2.
25.
25. O. Maragò, D. Ciampini, F. Fuso, E. Arimondo, C. Gabbanini, and S. T. Manson, Phys. Rev. 57, R4110 (1998).
http://dx.doi.org/10.1103/PhysRevA.57.R4110
26.
26. B. M. Patterson, T. Takekoshi, and R. J. Knize, Phys. Rev. 59, 2508 (1999).
http://dx.doi.org/10.1103/PhysRevA.59.2508
27.
27. A. V. Steele, B. Knuffman, and J. J. McClelland, J. Appl. Phys. 109, 104308 (2011).
http://dx.doi.org/10.1063/1.3585783
28.
28. J. E. Barth and P. Kruit, Optik 101, 101 (1996).
29.
29. M. Drewsen, P. Laurent, A. Nadir, G. Santarelli, A. Clairon, Y. Castin, D. Grison, and C. Salomon, Appl. Phys. B: Lasers Opt. 59, 283 (1994).
http://dx.doi.org/10.1007/BF01081396
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/content/aip/journal/jap/114/4/10.1063/1.4816248
2013-07-23
2016-06-01

Abstract

We report measurements and modeling of an ion source that is based on ionization of a laser-cooled atomic beam. We show a high brightness and a low energy spread, suitable for use in next-generation, high-resolution focused ion beam systems. Our measurements of total ion current as a function of ionization conditions support an analytical model that also predicts the cross-sectional current density and spatial distribution of ions created in the source. The model predicts a peak brightness of 2 × 10 A m sr eV and an energy spread less than 0.34 eV. The model is also combined with Monte-Carlo simulations of the inter-ion Coulomb forces to show that the source can be operated at several picoamperes with a brightness above 1 × 10 A m sr eV. We estimate that when combined with a conventional ion focusing column, an ion source with these properties could focus a 1 pA beam into a spot smaller than 1 nm. A total current greater than 5 nA was measured in a lower-brightness configuration of the ion source, demonstrating the possibility of a high current mode of operation.

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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
/content/realmedia?fmt=ahah&adPositionList=
&advertTargetUrl=//oascentral.aip.org/RealMedia/ads/&sitePageValue=jap.aip.org/114/4/10.1063/1.4816248&pageURL=http://scitation.aip.org/content/aip/journal/jap/114/4/10.1063/1.4816248'
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