Comparison of the Raman spectra and the spectrum for the example exposed to EUV in a hydrogen background has the highest D peak intensity. The spectra for the samples exposed to EUV irradiation show slightly lower D peak intensity. The pristine sample has the lowest D peak intensity. Note that the spectra are separated by an offset of counts/s.
I(D)/I(G) ratio mapping. (b) and (c) are I(D)/I(G) ratio maps for SEUV and . (a) and (d) are the EUV intensity profiles for SEUV and , respectively. The white circle indicates the mask boundary.
I(D)/I(G) ratio versus EUV power.
(a) XPS analysis: curve fitting results for SEUV ; (b) Element concentration versus EUV power for and SEUV ; (c) and (d) Bond concentration change with respect to the pristine sample versus EUV power for SEUV and .
Experimental settings summary. Two parameters vary among different experiments: Exposure time to EUV radiation and/or H2, hydrogen pressure.
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